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    Title :

    Ferroelectric thin film fabrication by direct UV-lithography


    Contributors:
    Benkler, M. (author) / Paul, F. (author) / Schott, J. (author) / Hanemann, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 1859-1867


    Publication date :

    2014-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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