Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.
Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography
2005-01-01
218458 byte
Conference paper
Electronic Resource
English
Fabrication of Photonic Crystals by Holographic Lithography Method
British Library Conference Proceedings | 2008
|British Library Conference Proceedings | 2005
|Fabrication of Three-Dimensional Photonic Crystals by Holographic Lithography
British Library Conference Proceedings | 2001
|