Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.


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    Title :

    Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography


    Contributors:
    Ishihara, K. (author) / Fujita, M. (author) / Matsubara, I. (author) / Asano, T. (author) / Noda, S. (author)


    Publication date :

    2005-01-01


    Size :

    218458 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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