Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.
Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography
01.01.2005
218458 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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