Nanoimprint lithography is attracting much attention for the development of large-scale photonic nanostructures. We demonstrate here a successful fabrication of two-dimensional photonic crystals with a period of 300 nm on a glass substrate at 360°C by using direct nanoimprint lithography.


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    Titel :

    Direct Fabrication of 2D Glass Photonic Crystals by Nanoimprint Lithography


    Beteiligte:
    Ishihara, K. (Autor:in) / Fujita, M. (Autor:in) / Matsubara, I. (Autor:in) / Asano, T. (Autor:in) / Noda, S. (Autor:in)


    Erscheinungsdatum :

    2005-01-01


    Format / Umfang :

    218458 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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