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    Title :

    Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip


    Contributors:
    Choi, D. K. (author) / Lee, S. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 3 ; 363-370


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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