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    Title :

    Fast prototyping of high-aspect ratio, high-resolution X-ray masks by gas-assisted focused ion beam


    Contributors:
    Khan Malek, C. (author) / Hartley, F. T. (author) / Neogi, J. (author)

    Published in:

    Publication date :

    2003-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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