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    Title :

    Silicon isotropic and anisotropic etching for MEMS applications


    Contributors:
    Negi, S. (author) / Bhandari, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 2 ; 203-210


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83






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