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    Title :

    Fabrication and characterization of PECVD silicon nitride for RF MEMS applications


    Contributors:
    Rahman, H. U. (author) / Johnson, B. C. (author) / Mccallum, J. C. (author) / Gauja, E. (author) / Ramer, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 1 ; 131-136


    Publication date :

    2013-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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