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    Title :

    Feature length-scale modeling of LPCVD and PECVD MEMS fabrication processes


    Contributors:
    Musson, L. C. (author) / Ho, P. (author) / Plimpton, S. J. (author) / Schmidt, R. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 137-142


    Publication date :

    2005-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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