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    Title :

    Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures


    Contributors:
    Sankar, A. R. (author) / Jency, J. G. (author) / Das, S. (author)

    Published in:

    Publication date :

    2012-01-01


    Size :

    15 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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