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    Title :

    Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer


    Contributors:
    Ravi Sankar, A. (author) / Das, S. (author) / Lahiri, S. K. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 4 ; 511-518


    Publication date :

    2009-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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