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    Title :

    Terahertz reflectometry images faults in silicon chips


    Contributors:
    Nagel, M. (author) / Kurz, H. (author)

    Published in:

    LASER FOCUS WORLD ; 47 , 11 ; 61-64


    Publication date :

    2011-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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    Gruger, H. / Egloff, T. / Scholles, M. et al. | British Library Online Contents | 2008