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    Title :

    ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON


    Contributors:
    Wan, D. P. (author) / Wang, J. (author) / Mathew, P. (author)

    Published in:

    Publication date :

    2011-01-01


    Size :

    21 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    671.35



    ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON

    Wan, D. P. / Wang, Jun / Mathew, Philip | British Library Online Contents | 2011



    Precise laser ablation with femtosecond pulses

    Momma, C. / Nolte, S. / Chichkov, B.N. et al. | IEEE | 1997


    Femtosecond laser ablation of materials [5147-23]

    Bruneau, S. / Hermann, J. / Sentis, M. L. et al. | British Library Conference Proceedings | 2003


    Micromachining of SiC by femtosecond laser ablation

    Aoki, N. / Sugioka, K. / Obata, K. et al. | IEEE | 2001