ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON
MACHINING SCIENCE AND TECHNOLOGY ; 15 , 3 ; 263-283
2011-01-01
21 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 671.35 |
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ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON
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