ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON
Machining science and technology ; 15 , 3 ; 263-283
2011-01-01
21 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 671.3505 |
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ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON
British Library Online Contents | 2011
|Precise laser ablation with femtosecond pulses
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|Micomachining of SiC by Femtosecond Laser Ablation
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|Femtosecond laser ablation of materials [5147-23]
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