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    Title :

    A water-tight packaging of MEMS electrostatic actuators for biomedical applications


    Contributors:
    Erismis, M. A. (author) / Pereira Neves, H. (author) / De Moor, P. (author) / Puers, R. (author) / Van Hoof, C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 12 ; 2109-2113


    Publication date :

    2010-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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