A water-tight packaging of MEMS electrostatic actuators for biomedical applications
MICROSYSTEM TECHNOLOGIES ; 16 , 12 ; 2109-2113
2010-01-01
5 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
British Library Online Contents | 2015
|Mems inertial power generators for biomedical applications
British Library Online Contents | 2006
|RF MEMS Packaging for Space Applications
AIAA | 2002
|RF MEMS Packaging for Space Applications
AIAA | 2004
|A MEMS VOA Using Electrothermal Actuators
British Library Online Contents | 2007
|