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    Title :

    SIMULTANEOUS DOUBLE-SIDE GRINDING OF SILICON WAFERS: A REVIEW AND ANALYSIS OF EXPERIMENTAL INVESTIGATIONS


    Contributors:
    Qin, N. (author) / Pei, Z. J. (author) / Fisher, G. (author) / Liu, J. (author)

    Published in:

    Publication date :

    2009-01-01


    Size :

    32 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    671.35



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