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    Title :

    Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology


    Contributors:
    Cui, F. (author) / Chen, W. (author) / Zhang, W. (author) / Xiao, Q. (author) / Ma, G. (author) / Liu, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 12 ; 1885-1896


    Publication date :

    2009-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83