Design of an electrostatically excited H-type resonant gyroscope suitable for fabrication using the LIGA process
Konstruktion eines elektrostatisch angeregten H-Resonanzgyroskops, das sich zur Herstellung nach dem LIGA Prozess eignet.
1998
14 pages
Proc.of the Institution of Mech.Eng. Part D;212(1998)4 ;319-332
Article (Journal)
English
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