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    Title :

    Design of an electrostatically excited H-type resonant gyroscope suitable for fabrication using the LIGA process


    Additional title:

    Konstruktion eines elektrostatisch angeregten H-Resonanzgyroskops, das sich zur Herstellung nach dem LIGA Prozess eignet.


    Contributors:


    Publication date :

    1998


    Size :

    14 pages


    Remarks:

    Proc.of the Institution of Mech.Eng. Part D;212(1998)4 ;319-332


    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English






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