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    Title :

    Study on micro hot embossing of low temperature co-firable ceramic green substrates


    Contributors:
    Shan, X. (author) / Maw, H. P. (author) / Ling, S. H. (author) / Lam, Y. C. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 8 ; 1225-1232


    Publication date :

    2009-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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