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    Title :

    Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing


    Contributors:
    Shan, X. (author) / Maw, H. P. (author) / Tjeung, R. T. (author) / Ling, S. H. (author) / Lu, C. W. (author) / Jachowicz, R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1405-1409


    Publication date :

    2008-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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