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    Title :

    A micro roller embossing process for structuring large-area substrates of laminated ceramic green tapes


    Contributors:
    Shan, X. (author) / Soh, Y. C. (author) / Shi, C. W. (author) / Jin, L. (author) / Lu, C. W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 8 ; 1319-1325


    Publication date :

    2009-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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