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    Title :

    Research development of measuring methods on the tribology characters for movable MEMS devices: a review


    Contributors:
    Guo, Z. (author) / Feng, Z. (author) / Fan, S. (author) / Zheng, D. (author) / Zhuang, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 3 ; 343-354


    Publication date :

    2009-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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