Research development of measuring methods on the tribology characters for movable MEMS devices: a review
MICROSYSTEM TECHNOLOGIES ; 15 , 3 ; 343-354
2009-01-01
12 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
An on-chip micro-friction tester for tribology research of silicon based MEMS devices
British Library Online Contents | 2008
|Single mask fabrication process for movable MEMS devices
British Library Online Contents | 2014
|Online Contents | 1998
|