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    Title :

    An on-chip micro-friction tester for tribology research of silicon based MEMS devices


    Contributors:
    Guo, Z. (author) / Meng, Y. (author) / Su, C. (author) / Wu, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 1 ; 109-118


    Publication date :

    2008-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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