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    Title :

    Micromachining of passive planar micromixer on poly (methyl methacrylate) substrate with excimer laser ablation


    Contributors:
    Qi, H. (author) / Liu, Y. (author) / Wang, X. (author) / Shen, F. (author) / Yu, Y. (author) / Chen, T. (author) / Zuo, T. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 2 ; 297-300


    Publication date :

    2009-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Excimer laser: a new tool for precision micromachining

    Endert, H. / Paetzel, R. / Basting, D. | British Library Online Contents | 1995


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    Herbst, L. / Klaft, I. / Wenzel, T. et al. | British Library Conference Proceedings | 2003


    Excimer laser micromachining based on dielectric masks [2246-07]

    Schmidt, H. / Ihlemann, J. / Wolff-Rottke, B. et al. | British Library Conference Proceedings | 1994