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    Title :

    Excimer laser microfabrication and micromachining [4088-24]



    Conference:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Publication date :

    2000-01-01


    Size :

    8 pages


    Remarks:

    Described as proceedings. Also known as LPM 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Laser precision microfabrication in Japan [4088-01]

    Miyamoto, I. / Ooie, T. / Takeno, S. et al. | British Library Conference Proceedings | 2000


    Novel results of laser precision microfabrication with excimer lasers and solid state lasers [4088-22]

    Stamm, U. / Fiebig, M. / Govorkov, S. V. et al. | British Library Conference Proceedings | 2000


    Micromachining with ultrafast lasers [4088-28]

    Shihoyama, K. / Furukawa, A. / Bado, P. et al. | British Library Conference Proceedings | 2000


    Advanced laser microfabrication of photonic components [4088-57]

    Herman, P. R. / Chen, K. P. / Corkum, P. B. et al. | British Library Conference Proceedings | 2000


    Micromachining using femtosecond lasers [4088-27]

    Tonshoff, H. K. / Ostendorf, A. / Nolte, S. et al. | British Library Conference Proceedings | 2000