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    Title :

    Novel results of laser precision microfabrication with excimer lasers and solid state lasers [4088-22]


    Contributors:

    Conference:

    1st, International symposium on laser precision microfabrication ; 2000 ; Omiya, Japan



    Publication date :

    2000-01-01


    Size :

    6 pages


    Remarks:

    Described as proceedings. Also known as LPM 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Excimer laser microfabrication and micromachining [4088-24]

    Gower, M. C. / Japan Laser Processing Society / Institute of Physical and Chemical Research et al. | British Library Conference Proceedings | 2000


    Laser precision microfabrication in Japan [4088-01]

    Miyamoto, I. / Ooie, T. / Takeno, S. et al. | British Library Conference Proceedings | 2000


    Laser microcaving of steel with solid state lasers [4088-44]

    Abeln, T. / Radtke, J. / Weikert, M. et al. | British Library Conference Proceedings | 2000


    High-resolution contact lithography by excimer lasers [4088-73]

    Huang, H. / Lu, D. / Du, L. et al. | British Library Conference Proceedings | 2000


    Novel technology for laser precision microfabrication of hard materials [4088-21]

    Sugioka, K. / Midorikawa, K. / Japan Laser Processing Society et al. | British Library Conference Proceedings | 2000