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    Title :

    Excimer laser: a new tool for precision micromachining


    Contributors:
    Endert, H. (author) / Paetzel, R. (author) / Basting, D. (author)


    Publication date :

    1995-01-01


    Size :

    18 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    537.5



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