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    Title :

    Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices


    Contributors:
    Hung, K. Y. (author) / Liang, T. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1217-1222


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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