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    Title :

    Soft X-ray lithography of high aspect ratio SU8 submicron structures


    Contributors:
    Reznikova, E. (author) / Mohr, J. (author) / Boerner, M. (author) / Nazmov, V. (author) / Jakobs, P. J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1683-1688


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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