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    Title :

    Chip-level integration of RF MEMS on-chip inductors using UV-LIGA technique


    Contributors:
    Park, D. S. (author) / Jeong, Y. (author) / Lee, J. B. (author) / Jung, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1429-1438


    Publication date :

    2008-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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