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    Title :

    Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors


    Contributors:
    Wang, Y. H. (author) / Lee, C. Y. (author) / Lin, C. H. (author) / Fu, L. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 7 ; 995-1000


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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