A low temperature MEMS process integrated with an infrared detector technology has been developed. The integrated microsystem is capable of electrically selecting narrow wavelength bands in the range from 1.6 to 2.5 /spl mu/m within the short-wavelength infrared (SWIR) region of the electromagnetic spectrum. Modelling of optical and mechanical aspects of the design along with further experimental is presented.
MEMS based tunable short-wavelength infrared sensors
2005-01-01
187948 byte
Conference paper
Electronic Resource
English
MEMS based Tunable Short-Wavelength Infrared Sensors
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