A low temperature MEMS process integrated with an infrared detector technology has been developed. The integrated microsystem is capable of electrically selecting narrow wavelength bands in the range from 1.6 to 2.5 /spl mu/m within the short-wavelength infrared (SWIR) region of the electromagnetic spectrum. Modelling of optical and mechanical aspects of the design along with further experimental is presented.


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    Title :

    MEMS based tunable short-wavelength infrared sensors


    Contributors:
    Faraone, L. (author)


    Publication date :

    2005-01-01


    Size :

    187948 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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