A low temperature MEMS process integrated with an infrared detector technology has been developed. The integrated microsystem is capable of electrically selecting narrow wavelength bands in the range from 1.6 to 2.5 /spl mu/m within the short-wavelength infrared (SWIR) region of the electromagnetic spectrum. Modelling of optical and mechanical aspects of the design along with further experimental is presented.
MEMS based tunable short-wavelength infrared sensors
01.01.2005
187948 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
MEMS based Tunable Short-Wavelength Infrared Sensors
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