Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    MEMS-based formaldehyde gas sensor integrated with a micro-hotplate


    Contributors:
    Lee, C. Y. (author) / Hsieh, P. R. (author) / Lin, C. H. (author) / Chou, P. C. (author) / Fu, L. M. (author) / Chiang, C. M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 10-11 ; 893-898


    Publication date :

    2006-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    THE HOTPLATE SNOWGAUGE

    Rasmussen, R. M. / Hallett, J. / Purcell, R. et al. | British Library Conference Proceedings | 2002


    Micro-hotplate based temperature stabilization system for CMOS SAW resonators

    Nordin, A. N. / Voiculescu, I. / Zaghloul, M. | British Library Online Contents | 2009


    Improving A Guarded Hotplate

    Chafey, D. / Hennessee, G. C. | NTRS | 1983


    MEMS rotation sensor with integrated electronics

    NASIRI STEVEN S / YARALIOGLU GOKSEN G / SEEGER JOSEPH et al. | European Patent Office | 2017

    Free access

    Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors

    Wang, Y. H. / Lee, C. Y. / Lin, C. H. et al. | British Library Online Contents | 2008