A rotational sensor for measuring rotational acceleration is disclosed. The rotational sensor comprises a sense substrate; at least two proof masses, and a set of two transducers. Each of the at least two proof masses is anchored to the sense substrate via at least one flexure and electrically isolated from each other; and the at least two proof masses are capable of rotating in-plane about a Z-axis relative to the sense substrate, wherein the Z-axis is normal to the substrate. Each of the transducers can sense rotation of each proof mass with respect to the sense substrate in response to a rotation of the rotational sensor.


    Access

    Download


    Export, share and cite



    Title :

    MEMS rotation sensor with integrated electronics


    Contributors:

    Publication date :

    2017-12-19


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    G01P MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK , Messen der Linear- oder Winkelgeschwindigkeit, der Beschleunigung, der Verzögerung oder des Stoßes / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR



    An Integrated CMOS MEMS Xylophone Magnetometer with Capacitive Sense Electronics

    Tucker, John / Wesoleck, Danielle / Wickenden, Dennis | AIAA | 2002


    AIAA-2002-5723 An Integrated CMOS MEMS Xylophone Magnetometer with Capacitive Sense Electronics

    Tucker, J. / Wesoleck, D. / Wickenden, D. et al. | British Library Conference Proceedings | 2002


    The Integrated Optics Rotation Sensor (IORS)

    Fitzpatrick, C. / Vali, V. / Youmans, B. et al. | Tema Archive | 1997


    MEMS for Automotive and Consumer Electronics

    Marek, Jiri | Tema Archive | 2010


    Micro-rotation angle sensor with integrated hall IC

    Ina, T. / Takeda, K. / Sawada, A. et al. | Tema Archive | 2008