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    Title :

    Development of automated microrobot-based nanohandling stations for nanocharacterization


    Contributors:
    Fatikow, S. (author) / Eichhorn, V. (author) / Krohs, F. (author) / Mircea, I. (author) / Stolle, C. (author) / Hagemann, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 463-474


    Publication date :

    2008-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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