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    Title :

    ANALYSIS OF DUAL FREQUENCY CONFINED CAPACITIVELY COUPLED PLASMA AT LOW POWER


    Contributors:
    Helhel, S. (author)


    Publication date :

    2006-01-01


    Size :

    15 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3612



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