ANALYSIS OF DUAL FREQUENCY CONFINED CAPACITIVELY COUPLED PLASMA AT LOW POWER
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES ; 27 , 4 ; 615-629
2006-01-01
15 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 621.3612 |
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Low-power radio-frequency capacitively coupled plasma in air: an alternative spectral source?
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