PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES ; 27 , 11 ; 1497-1515
2006-01-01
19 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 621.3612 |
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