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    Title :

    PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS


    Contributors:
    Helhel, S. (author) / Ellingboe, A. R. (author) / Cerezci, O. (author) / Gaman, C. (author)


    Publication date :

    2006-01-01


    Size :

    19 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3612



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