PLASMA DENSITY MEASUREMENTS OF CONFINED CAPACITIVELY COUPLED PLASMA BY MICROWAVE INTERFEROMETER AND ION ENERGY DISTRIBUTION FUNCTION METHODS
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES ; 27 , 11 ; 1497-1515
2006-01-01
19 pages
Article (Journal)
English
DDC: | 621.3612 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
ANALYSIS OF DUAL FREQUENCY CONFINED CAPACITIVELY COUPLED PLASMA AT LOW POWER
British Library Online Contents | 2006
|British Library Conference Proceedings | 2012
|Low-power radio-frequency capacitively coupled plasma in air: an alternative spectral source?
British Library Conference Proceedings | 2000
|