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    Title :

    Study on the method for the reliability test of focused ion beam


    Contributors:
    Lee, S. H. (author) / Kang, H. W. (author) / Cho, D. W. (author) / Moon, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 5-6 ; 569-577


    Publication date :

    2007-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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