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    Title :

    Dynamic analysis of torsional resonance mode of atomic force microscopy and its application to in-plane surface property extraction


    Contributors:
    Song, Y. (author) / Bhushan, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 3 ; 219-230


    Publication date :

    2006-01-01


    Size :

    12 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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