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    Title :

    Application of atomic force microscopy in resist structure evaluation


    Additional title:

    Anwendung der AFM auf die Bewertung der Struktur von Widerstaenden.


    Contributors:

    Publication date :

    2004


    Size :

    6 pages


    Remarks:

    VDI-Ber.; 2004;8th Int.Symposium on Measurement and Quality Control in Production;VDI-Berichte;Nr.;1860


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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