Application of atomic force microscopy in resist structure evaluation
Anwendung der AFM auf die Bewertung der Struktur von Widerstaenden.
2004
6 pages
VDI-Ber.; 2004;8th Int.Symposium on Measurement and Quality Control in Production;VDI-Berichte;Nr.;1860
Miscellaneous
English
Optical Microscopy, Atomic Force Microscopy (AFM) and SNOM
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