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    Title :

    OPTOELECTRONICS APPLICATIONS: MATERIALS PROCESSING Excimers take more-refined approach to micromachining


    Contributors:
    Kincade, K. (author)

    Published in:

    LASER FOCUS WORLD ; 41 , 10 ; 69-75


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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