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    Title :

    EXCIMER LASERS Small excimers shine in scientific applications


    Contributors:
    Grondin, J. (author)

    Published in:

    LASER FOCUS WORLD ; 40 ; 112-116


    Publication date :

    2004-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



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    Excimer lasers and applications III : proceedings

    European Physical Society / West European Optical Societies / Society of Photo-optical Instrumentation Engineers et al. | TIBKAT | 1991


    FOCUS ON: MICROELECTRONICS PROCESSING Solid-state lasers challenge excimers in IC processing

    Flores, J. / Droes, S. / Joshi, P. et al. | British Library Online Contents | 2002