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    Title :

    Small excimers opening up new industrial applications [2992-02]



    Conference:

    Meeting, Excimer lasers, optics, and applications ; 1997 ; San Jose; CA



    Publication date :

    1997-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 2992

    DataCite | 1902


    EXCIMER LASERS Small excimers shine in scientific applications

    Grondin, J. | British Library Online Contents | 2004


    Excimer laser machining of advanced materials [2992-17]

    Toenshoff, H. K. / Von Alvensleben, F. / Heekenjann, P. B. et al. | British Library Conference Proceedings | 1997


    Optimization of 200-W excimer laser for TFT annealing [2992-05]

    Pfeufer, V. / Voss, F. / Becker-De Mos, B. et al. | British Library Conference Proceedings | 1997


    Processing applications with the 157-nm fluorine excimer laser [2992-15]

    Herman, P. R. / Beckley, K. / Jackson, B. et al. | British Library Conference Proceedings | 1997