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    Title :

    An anisotropic diffusion-based defect detection for sputtered surfaces with inhomogeneous textures


    Contributors:
    Tsai, D. M. (author) / Chao, S. M. (author)

    Published in:

    IMAGE AND VISION COMPUTING ; 23 , 3 ; 325-338


    Publication date :

    2005-01-01


    Size :

    14 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.367



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