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    Title :

    Defect detection in inhomogeneously textured sputtered surfaces using 3D Fourier image reconstruction


    Contributors:
    Tsai, D. M. (author) / Kuo, C. C. (author)

    Published in:

    Publication date :

    2007-01-01


    Size :

    18 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    006.42



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