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    Title :

    Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching


    Contributors:
    Chu, H.-Y. (author) / Fang, W. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 2/3 ; 141-150


    Publication date :

    2005-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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