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    Title :

    High aspect ratio spiral and vertical meander micro coils for actuator applications


    Contributors:
    Seidemann, V. (author) / Kohlmeier, T. (author) / Fohse, M. (author) / Gatzen, H. H. (author) / Buttgenbach, S. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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